Australian Government Department of Defence
Toxic Gas Cabinet Upgrade
Details
Description
Toxic gases are used in Building 185 for processes involving the Plasma Enhanced Chemical Vapour Deposition and Etching system (PECVD/RIE). The gases include Silane, Silane-Phosphine mixture and Ammonia.
The existing Auto-Purge M system was superseded many years ago and is no longer supported. The installed system has become unreliable, with two of the six Auto-Purge M systems proving unserviceable.
The toxic gas cabinets form part of a safety critical system required to control gas delivery, provide a safety shut-off operation in the event of a gas leak. The toxic gas cabinets operate in concert with the Vertex toxic gas detection system to meet Australian OH&S regulations related to a laboratory.
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Request for Tender
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Key details
- Source
- AusTender
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1Contract awarded
$94,570 awarded to 1 supplier
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